Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /
Frühauf, Joachim.
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] : by Joachim Frühauf. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. - v.: digital
9783540268765
Chemistry
Chemical engineering
Microwaves
Electronics
Optical materials
Chemistry
Optical and Electronic Materials
Electronics and Microelectronics, Instrumentation
Ceramics, Glass, Composites, Natural Methods
Microwaves, RF and Optical Engineering
Industrial Chemistry/Chemical Engineering
QC611.8.S5 / F78 2005
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] : by Joachim Frühauf. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. - v.: digital
9783540268765
Chemistry
Chemical engineering
Microwaves
Electronics
Optical materials
Chemistry
Optical and Electronic Materials
Electronics and Microelectronics, Instrumentation
Ceramics, Glass, Composites, Natural Methods
Microwaves, RF and Optical Engineering
Industrial Chemistry/Chemical Engineering
QC611.8.S5 / F78 2005