MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01206nmm a22003255u 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20210513094919.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
100301s2005 xx j eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783540268765 |
| 050 04 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
QC611.8.S5 |
| Item number |
F78 2005 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Frühauf, Joachim. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Shape and Functional Elements of the Bulk Silicon Microtechnique |
| Medium |
[electronic resource] : |
| Remainder of title |
A Manual of Wet-Etched Silicon Structures / |
| Statement of responsibility, etc |
by Joachim Frühauf. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Berlin, Heidelberg : |
| Name of publisher, distributor, etc |
Springer-Verlag Berlin Heidelberg, |
| Date of publication, distribution, etc |
2005. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Other physical details |
v.: digital |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Chemistry |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Chemical engineering |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microwaves |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Electronics |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Optical materials |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Chemistry |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Optical and Electronic Materials |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Electronics and Microelectronics, Instrumentation |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Ceramics, Glass, Composites, Natural Methods |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microwaves, RF and Optical Engineering |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Industrial Chemistry/Chemical Engineering |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
|---|
| Title |
Springer eBooks |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://dx.doi.org/10.1007/b138230 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Biblioteca del Cogreso de los Estados Unidos |
| Koha item type |
Libro Electrónico |