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Chemical mechanical planarization of microelectronic materials : /

Steigerwald, Joseph M.

Chemical mechanical planarization of microelectronic materials : / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann. - New York : John Wiley, 1997 - 324 p. ; ils. ; 23 cm.

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ISBN: 0471138274

Subjects--Topical Terms:
Microelectronica --Materiales

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