Chemical mechanical planarization of microelectronic materials : / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.
Material type: TextPublication details: New York : John Wiley, 1997Description: 324 p. ; ils. ; 23 cmISBN:- 0471138274
Item type | Current library | Call number | Vol info | Copy number | Status | Notes | Date due | Barcode | |
---|---|---|---|---|---|---|---|---|---|
Libro | Biblioteca de la Facultad de Ingeniería Química General | TK7871 S74 1997 (Browse shelf(Opens below)) | BIQO000001975 | C:1 | Consulta | Solo para lectura | BIQO000001975 |
Incluye índice
There are no comments on this title.
Log in to your account to post a comment.