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1.
Wafer Level 3-D ICs Process Technology [electronic resource] / edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif. by Series: Integrated Circuits and Systems
Material type: Computer file Computer file; Format: electronic
Publication details: Boston, MA : Springer-Verlag US, 2008
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TK7874 T36 2008.

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2.
Chemical mechanical planarization of microelectronic materials : / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann. by
Material type: Text Text; Literary form: Not fiction
Publication details: New York : John Wiley, 1997
Availability: Items available for reference: Biblioteca de la Facultad de Ingeniería Química: Consulta (1)Call number: TK7871 S74 1997.

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