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Chemical mechanical planarization of microelectronic materials : / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.

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Material type: Text

TextPublication details: New York : John Wiley, 1997Description: 324 p. ; ils. ; 23 cmISBN:

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Holdings
Item type	Current library	Call number	Vol info	Copy number	Status	Notes	Date due	Barcode
Libro	Biblioteca de la Facultad de Ingeniería Química General	TK7871 S74 1997 (Browse shelf(Opens below))	BIQO000001975	C:1	Consulta	Solo para lectura		BIQO000001975

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