Chemical mechanical planarization of microelectronic materials : / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
- 0471138274
Item type | Current library | Call number | Vol info | Copy number | Status | Notes | Date due | Barcode | |
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Biblioteca de la Facultad de Ingeniería Química General | TK7871 S74 1997 (Browse shelf(Opens below)) | BIQO000001975 | C:1 | Consulta | Solo para lectura | BIQO000001975 |
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